| X射线能谱分析中对铁的百分含量修正的理论推导和实验测定 |
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| 引用本文： | 徐军,陈文雄.X射线能谱分析中对铁的百分含量修正的理论推导和实验测定[J].电子显微学报,1993,12(3):277-283. |
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| 作者姓名： | 徐军 陈文雄 |
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| 作者单位： | 北京大学电镜实验室，北京大学电镜实验室 北京 100871，北京 100871 |
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| 摘 要： | 在KYKY-1000B扫描电镜上进行X射线能谱分析时,常出现附加的铁峰。本文从理论上对产生附加铁峰的原因作出了解释,并推导出附加铁峰强度和样品原子序数的函数关系的解析表达式,同时对附加的铁的百分含量进行了实验测量。由实验数据拟合得出的实验曲线和理论分析得出的表达很好地符合。
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| 关 键 词： | X射线能谱 特征谱峰 铁 电子显微镜 SEM |
Theoretical Expression and Experimental Measurement on Correction for Fe Weight Fraction in EDS |
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| Xu Jun Chen Wenxiong.Theoretical Expression and Experimental Measurement on Correction for Fe Weight Fraction in EDS[J].Journal of Chinese Electron Microscopy Society,1993,12(3):277-283. |
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| Authors: | Xu Jun Chen Wenxiong |
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| Abstract: | Additional Fe X-ray spectral peaks are always observed in quantitative analysis of EDS on KYKY-1000B SEM. Analytical expression for this false addtional peak intensity as a function of atom number of the analyzed sample has been presented in this paper. Emperimental data, fitted by least squared method shows good agree-ment with the analytical expression. The result is practically useful for enhancing analytical precision. |
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| Keywords: | X-ray EDS additional Fe charaoteristic spectral peak backscatted coefficient the most probabal energy for BSE data fit by least square method |
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