Number density and temperature measurements obtained using sensitive diode laser spectroscopy in an argon plasma |
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Authors: | B Bakowski G Hancock R Peverall GAD Ritchie |
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Institution: | (1) Physical and Theoretical Chemistry Laboratory, The University of Oxford, South Parks Road, Oxford, OX1 3QZ, UK |
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Abstract: | The absolute concentration and translational temperature of the 2p10 and 2p7 excited states of argon have been measured in an inductively coupled plasma chamber under a variety of operating conditions
using both calibrated diode laser frequency modulation spectroscopy and cavity enhanced absorption spectroscopy. Accurate
lineshape analysis of frequency modulation signals has been employed to extract the desired information, and is corroborated
by cavity enhanced measurements. Temperatures are found to vary linearly with pressure from ∼400 K at 20 mTorr (2.7 Pa) to
∼510 K at 90 mTorr (12 Pa) in a 200 W discharge while concentrations peak at 3.25×108 cm-3 at 30 mTorr (4 Pa) (also in a 200 W discharge). The uncertainty in the recovered temperature is 7%, dominated by uncertainties
in the calibration of the frequency scale.
PACS 42.62Fi; 52.70kz |
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Keywords: | |
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