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化学气相沉积金刚石探测器测量软X射线能谱
引用本文:侯立飞,李芳,袁永腾,杨国洪,刘慎业.化学气相沉积金刚石探测器测量软X射线能谱[J].物理学报,2010,59(2):1137-1142.
作者姓名:侯立飞  李芳  袁永腾  杨国洪  刘慎业
作者单位:中国工程物理研究院激光聚变研究中心,绵阳 621900
基金项目:国家高技术研究发展计划(批准号:2008AA804118)资助的课题.
摘    要:金刚石具备高热导率、高电阻率、高击穿电场、大的禁带宽度、介电系数小、载流子迁移率高以及抗辐射能力强等特性,可作为已应用于惯性约束聚变(ICF)实验X射线测量的硅与X射线二极管的较好替代品.随着化学气相沉积(CVD)技术的发展,CVD金刚石受到人们越来越多的关注.文中利用拉曼谱仪和X射线衍射仪对1mm×1mm×2mm,1mm×1mm×3mm两种规格CVD金刚石完成品质检测后,完成了CVD金刚石X射线探测器的集成制作,并在8ps激光器和神光III原型装置上开展了探测器时间特性等性能研究.实验结果表明,整个探测器系统前沿响应时间可达60ps,半高全宽可达120ps,与X射线二极管探测系统时间特性一致.在神光Ⅲ原型装置实验中,没有观察到探测器对3ω0激光的响应,说明探测器具有好的抗干扰能力.其测得的温度曲线与软X射线能谱仪测量结果一致,实现了X射线能谱测量的初步应用.

关 键 词:化学气相沉积金刚石  探测器  X射线测量  响应时间
收稿时间:2009-04-23
修稿时间:7/4/2009 12:00:00 AM

Chemical vapor deposited diamond detectors for soft X-ray power measurement
Hou Li-Fei,Li Fang,Yuan Yong-Teng,Yang Guo-Hong,Lie Shen-Ye.Chemical vapor deposited diamond detectors for soft X-ray power measurement[J].Acta Physica Sinica,2010,59(2):1137-1142.
Authors:Hou Li-Fei  Li Fang  Yuan Yong-Teng  Yang Guo-Hong  Lie Shen-Ye
Abstract:A class of wide band-gap semiconductor offers an attractive alternative to Si and X-ray diode detector technologies for X-ray detection in inertia contract fusion (ICF) experiments, because diamond has high thermal conductivity, resistivity and breakdown field, fast charge collection, low leakage current, wide band-gap, low dielectric constant, large carrier drift velocity and outstanding radiation hardness. Using chemical vapor deposition (CVD), diamond of 1 mm × 1 mm × 2 mm, 1 mm×1 mm × 3 mm was synthesized. The quality of diamond has been examined by Ramma spectrum and X-ray diffraction. And the detectors were fielded. Characteristics of these detectors have been studied on an 8 ps pulse-wide laser equipment and SGIII-prototype equipment. The results indicate that the rise time and full width at half maximum of the detector system reach 60 ps and 120 ps, respectively. The measured spectrum is consistent with the result of soft X-ray spectrometer. There is no response to 3ω_0 laser for the CVD detector. The applications of CVD diamond for X-ray measurement in ICF experiments are reviewed.
Keywords:chemical vapor deposited diamond  detector  X-ray measurement  response time
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