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Development of MEMS-based micro capacitive tactile probe |
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| Affiliation: | [1]School of Physics Science and Engineering, Tongji University, Shanghai 200092, China; [2]Shanghai Institute of Measurement and Testing Technology, National Center of Measurement and Testing for East China, National Center of Testing Technology, Shanghai 201203, China; [3]Key Laboratory of Photochemical Conversion and Optoelectronic Materials,Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China |
| Abstract: | micro tactile probe, micro capacitive sensor, MEMS, nano measuring machine |
| Keywords: | micro tactile probe micro capacitive sensor MEMS nano measuring machine |
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