|
|||||
|
|
Realization of conformal doping on multicrystalline silicon solar cells and black silicon solar cells by plasma immersion ion implantation |
|
| Authors: | Shen Ze-Nan Xia Yang Liu Bang-Wu Liu Jin-Hu Li Chao-Bo and Li Yong-Tao |
| Institution: | Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China |
| Abstract: | solar cells, plasma immersion ion implantation, conformal doping, black silicon |
| Keywords: | solar cells plasma immersion ion implantation conformal doping black silicon |
| 本文献已被 CNKI 维普 等数据库收录！ | |