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Energy distribution of ions in plasma formed by laser ablation of metallic Nb and Ta targets
Authors:O. A. Novodvorsky   O. D. Khramova   E. O. Filippova   C. Wenzel  J. W. Bartha
Affiliation:a Institute on Laser and Information Technologies, Russian Academy of Sciences, Svytoozerskaya 1, 140700, Shatura, Moscow Region, Russian Federation;b Dresden University of Technology, Institute of Semiconductor and Microsystems Technology, D-01062 Dresden, Germany
Abstract:The laser plasma plume expansion induced by UV nanosecond irradiation from metallic Nb and Ta targets has been studied using Langmuir probe time-of-flight measurements. The ion current shape was measured as a function of the laser radiation flux at various probe-to-target distances. The ion velocity distribution and the ion energy spectra have been determined by measuring the time of flight of ions reaching the Langmuir probe. A multi-mode velocity distribution of ions has been revealed. The dependence of the amplitudes of the plume energy components on the plume scatter time and on the laser radiation flux has been investigated. The experimental time-of-flight data have been compared with a Maxwell velocity distribution. The threshold values of the laser intensity were determined for different distribution modes in the ion energy spectrum.
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