Research of spatial resolution in external electro-optic probing |
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| Authors: | Hongbo Zhang Rui Wang Kaixin Chen Han Yang Daming Zhang Maobin Yi Guoquan Wang Zhenchang Ma |
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| Affiliation: | a State Key Laboratory on Integrated Opto-electronics, Jilin University Region, Changchun 130023, China
b Hebei Semiconductor Institute, Shijiazhuang, 050000, China |
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| Abstract: | A new method, based on zero point of longitudinal electric field, was used to determine the spatial resolution of external electro-optic (EO) probing equipment. Considering the diffraction of Gauss beam, the result of external EO probing was simulated which was in accordance with the experiment. A spatial resolution <1 μm was demonstrated initially in our equipment using 650 nm laser diode as probe beam and semi-insulating GaP as probe tip. |
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| Keywords: | External electro-optic probing Spatial resolution Semi-insulating GaP |
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