A competition between (0 0 1) and (0 1 1) alignments in yttria stabilized zirconia thin films fabricated by ion beam assisted deposition |
| |
Authors: | Z Wang BJ Yan F Feng H Chen K Shi Z Han |
| |
Institution: | 1. Department of Physics, School of Science, Beijing Institute of Technology, Beijing 100081, People’s Republic of China;2. Applied Superconductivity Research Center, Department of Physics, Tsinghua University, Beijing 100084, People’s Republic of China |
| |
Abstract: | Biaxially textured yttria stabilized zirconia (YSZ) thin films, were deposited on glass substrates by ion beam assisted deposition method with different deposition time. As contrasts, films were also fabricated without assisting ion beam. The orientation properties of the films were characterized by X-ray diffraction. A comparative study shows that there is a competition between (0 0 1) and (0 1 1) alignments during the growth process. Assisting ions make the films (0 0 1)-advantaged and biaxially textured. The competitive growth and the orientation development are explained by selective resputtering and anisotropic damage on growing films induced by assisting ions. |
| |
Keywords: | |
本文献已被 ScienceDirect 等数据库收录! |
|