Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits |
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| Authors: | Kiwa Toshihiko Tonouchi Masayoshi Yamashita Masatsugu Kawase Kodo |
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| Affiliation: | Research Center for Superconductor Photonics, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan. kiwa@rcsuper.osaka-u.ac.jp |
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| Abstract: | A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection. |
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