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Surface charge estimation on hemispherical dielectric samples from EFM force gradient measurements
Authors:A. Gomez  A. Avila  Juan P. Hinestroza
Affiliation:1. Microelectronic Center Andes University (CMUA), Universidad de los Andes, Bogotá-Colombia;2. Department of Fiber Science & Apparel Design, Cornell University, NY, USA
Abstract:A numerical model capable of estimating the surface charge density(σS) and the dielectric constant(ke) of a hemispherical sample from force gradient measurements is proposed. Force gradients are commonly detected by a biased conductive tip during electrostatic force microscopy(EFM) probing but provide limited quantitative assessment of the charge in the sample. The proposed model gives an analytical solution for the force exerted over a biased conical tip. Theoretical numerical results, presented in the form of multitraces of minimum force gradients for fixed bias voltages and tip-sample distances allow the translation of EFM force gradient measurements into functions of σS and ke.
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