提高微晶硅薄膜太阳电池效率的研究

采用甚高频等离子体增强化学气相沉积技术制备了系列微晶硅薄膜太阳电池，指出了气体总流量和背反射电极的类型对电池性能参数的影响.电池的I-V测试结果表明：随反应气体总流量的增加，对应电池的短路电流密度、开路电压和填充因子都有很大程度的提高，结果使得电池的光电转换效率得以提高.另外，ZnO/Ag/Al背反射电极能明显提高电池的短路电流密度，进而也提高了电池的光电转换效率.对气体总流量和背反射电极类型影响电池效率的原因进行了分析. 关键词： 微晶硅薄膜太阳电池 气体流量 ZnO/Ag/Al背反射电极

Investigation of improved conversion efficiency of microcrystalline silicon thin film solar cells

A series of microcrystalline silicon thin films solar cells were fabricated by very high frequency plasma enhanced chemical vapor deposition at different total gas flow rates and on different back reflectors. The results of I-V measurements of solar cells showed that the characteristic parameters of solar cells were all improved with the increase of total flow rate, so conversion efficiency of solar cells were increased. In addition, short circuit current (J_ sc ) of solar cells was greatly reduced, as a result, conversion efficiency of solar cells were improved when ZnO/Ag/Al back reflector were incorporated into solar cells. The details can be seen in the paper.