Effect of the structure of a graphite target on the parameters of carbon films obtained by the laser plasma method |
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Authors: | I I Azarko V K Goncharov G A Gusakov D R Ismailov M V Puzyrev |
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Institution: | (1) A. N. Sevchenko Institute of Applied Physical Problems, Belorussian State University, 7 ul. Kurchatova, Minsk, 220108, Belarus |
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Abstract: | We have used Raman light scattering and electron paramagnetic resonance methods to study carbon films obtained by laser plasma
deposition, using different types of graphite targets. We have established that the films deposited in this way have a diamond-like
structure and are a nanostructured composite containing clusters of both sp2 and sp3-hybridized carbon. We have shown that an increase in structural perfection of the graphite target causes an improvement in
the structure of the carbon films obtained from it and an increase in the content of sp3-hybridized carbon in it. Thermal stimulation of the substrate during application of a coating leads to the same effect.
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 75, No. 4, pp. 539–546, July–August, 2008. |
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Keywords: | carbon film laser plasma deposition structure electron paramagnetic resonance Raman light scattering |
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