| 用干涉显微镜测量薄膜厚度的改进与分析 |
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| 引用本文： | 许剑,欧蔼庆,黄佐华.用干涉显微镜测量薄膜厚度的改进与分析[J].物理实验,2008,28(2):5-7,13. |
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| 作者姓名： | 许剑 欧蔼庆 黄佐华 |
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| 作者单位： | 华南师范大学,物理与电信工程学院,广东,广州,510006 |
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| 摘 要： | 将干涉显微镜的应用推广到透明薄膜厚度的测量,扩展了干涉显微镜的测量范围和应用领域.基于菲涅耳公式,分析了透明薄膜界面的反射.根据白光干涉原理,利用圆形样品台的定量移动,实现了薄膜厚度的测量.
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| 关 键 词： | 干涉显微镜 白光干涉 透明薄膜 厚度 干涉原理 镜测量 薄膜厚度 改进 分析 interference microscope thickness measuring analysis 移动 定量 样品台 利用 反射 薄膜界面 公式 菲涅耳 应用推广 测量范围 扩展 |
| 文章编号： | 1005-4642（2008）02-0005-03 |
| 收稿时间： | 2007-09-26 |
| 修稿时间： | 2007-12-16 |
Improvement and analysis of measuring thickness using interference microscope |
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| XU Jian,OU Ai-qing,HUANG Zuo-hua.Improvement and analysis of measuring thickness using interference microscope[J].Physics Experimentation,2008,28(2):5-7,13. |
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| Authors: | XU Jian OU Ai-qing HUANG Zuo-hua |
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| Abstract: | The interference microscope has been applied to the measurement of the transparent thin film thickness, thus the measurement range and the application field of the interference microscope have been expanded. Basing on Freshnel formula, the reflection on the interfaces of the trans-parent thin film has been analyzed. According to the principle of white light interference, the measurement of the film thickness is realized by using the quantitative movements of the circular sample holder. |
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| Keywords: | interference microscope interference of white light transparent thin film thickness |
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