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Ni-Zn铁氧体薄膜的结构和磁性
引用本文:高建华,崔艺涛,杨正.Ni-Zn铁氧体薄膜的结构和磁性[J].物理学报,2004,53(10):3550-3554.
作者姓名:高建华  崔艺涛  杨正
作者单位:兰州大学磁性材料研究所,兰州 730000
基金项目:国家自然科学基金(批准号:59971023)资助的课题.
摘    要:采用交替溅射方法制备了Ni_Zn铁氧体薄膜,并研究了薄膜成分和制 备条件例如热处理温度、氧分压、膜厚、衬底层等因素对Ni_Zn铁氧体薄膜的影响.实验表明沉积态薄膜为非晶态,经大气中不同温度热处理后得到了尖晶石结构,其主峰为(311)峰 .另外,通过不同条件对Ni_Zn铁氧体薄膜的研究,找到了合适的Ni_Zn铁氧体薄膜的制备条件. 关键词: 薄膜 Ni_Zn铁氧体 交替溅射

关 键 词:薄膜  Ni_Zn铁氧体  交替溅射
收稿时间:2003-12-17

The structure and magnetic properties of Ni-Zn ferrite films
Gao Jian-Hu,Cui Yi-Tao and Yang Zheng.The structure and magnetic properties of Ni-Zn ferrite films[J].Acta Physica Sinica,2004,53(10):3550-3554.
Authors:Gao Jian-Hu  Cui Yi-Tao and Yang Zheng
Abstract:Ni_Zn ferrite films were fabricated by alternatively sputtering method. The effects of composition and fabrication conditions on Ni_Zn ferrite films were investigated. It is indicated that the as_deposited films were amorphous, but after annealing in air at different temperatures the spinel phase was formed and the main peaks were (311) peaks. In additional, after the investigation of the effects of different conditions on Ni_Zn ferrite films, the optimum conditions, was obtained for growth of Ni_Zn ferrite films.
Keywords:thin film  Ni_Zn ferrites  alternative sputtering method
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