| LTCC五阶LC带通滤波器的设计与关键工艺分析 |
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| 引用本文： | 王美兰,李天明,郑宏宇,赵祖军,高岭.LTCC五阶LC带通滤波器的设计与关键工艺分析[J].半导体技术,2010,35(11):1130-1133. |
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| 作者姓名： | 王美兰 李天明 郑宏宇 赵祖军 高岭 |
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| 作者单位： | 电子科技大学,国家863计划强辐射实验室,成都,610054;中国电子科技集团公司,第十三研究所,石家庄,050051 |
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| 摘 要： | 低温共烧陶瓷(LTCC)技术具有内埋置无源元件、集成度高、可靠性好以及优良的高频特性等特点,成为无线通讯系统中更具影响力与竞争力的技术之一.在了解现有工艺平台的基础上,利用集总参数元件进行带通滤波器的设计,使用高频电磁场仿真软件Ansoft HFSS建立滤波器的物理模型并对其进行仿真,经LTCC工艺线加工出中心频率为1500 MHz、带宽为800 MHz的LC带通滤波器.成品经矢量网络分析仪Agilent E8358A测试,测试结果与仿真曲线吻合较好,都符合设计值的要求.最后对影响滤波器性能的一些关键工艺进行了分析,达到了将LTCC 滤波器设计与工艺实现相结合的目的.
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| 关 键 词： | 低温共烧陶瓷 带通滤波器 仿真 测试 关键工艺 |
Design of Five-Order LC Bandpass Filters Realized by LTCC and Analyzation of Key Technics |
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| Wang Meilan,Li Tianming,Zheng Hongyu,Zhao Zujun,Gao Ling.Design of Five-Order LC Bandpass Filters Realized by LTCC and Analyzation of Key Technics[J].Semiconductor Technology,2010,35(11):1130-1133. |
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| Authors: | Wang Meilan Li Tianming Zheng Hongyu Zhao Zujun Gao Ling |
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| Institution: | Wang Meilan1,Li Tianming1,Zheng Hongyu2,Zhao Zujun2,Gao Ling2(1.High Power Radiation Lab.,UESTC,Chengdu 610054,China,2.The 13th Research Institute,CETC,Shijiazhuang 050051,China) |
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| Abstract: | The Low temperature co-fired ceramic(LTCC) technology has the embedded passive components,high integration,fine reliability and excellent characteristic of high frequency and become one of the more influence and emulative technologies in wireless communication systems.Based on the existing process platform,the bandpass filter was designed with lumped elements and the physical model was established and simulated by the electromagnetic simulated soft(Ansoft HFSS).A number of bandpass filters were produced thr... |
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| Keywords: | low temperature co-fired ceramic(LTCC) bandpass filter(BPF) simulation testing key technics |
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