| Advanced Heterodyne Interferometer with Common Path for Roughness Measurement |
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| 引用本文： | LI Xiang, WANG Jia, ZHAO Yang, LI Dacheng,CAO Mang(Department of Precision Instruments,Tsinghua University Beijing 100084,China). Advanced Heterodyne Interferometer with Common Path for Roughness Measurement[J]. Chinese Journal of Lasers, 1995, 4(3): 257-261 |
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| 作者姓名： | LI Xiang WANG Jia ZHAO Yang LI Dacheng CAO Mang(Department of Precision Instruments Tsinghua University Beijing 100084 China) |
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| 作者单位： | Department of Precision Instruments，Tsinghua University Beijing 100084，China |
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| 摘 要： | ＡｄｖａｎｃｅｄＨｅｔｅｒｏｄｙｎｅＩｎｔｅｒｆｅｒｏｍｅｔｅｒｗｉｔｈＣｏｍｍｏｎＰａｔｈｆｏｒＲｏｕｇｈｎｅｓｓＭｅａｓｕｒｅｍｅｎｔ￥ＬＩＸｉａｎｇ；ＷＡＮＧＪｉａ；ＺＨＡＯＹａｎｇ；ＬＩＤａｃｈｅｎｇ；ＣＡＯＭａｎｇ（Ｄｅｐａｒｔｍｅｎｔｏｆ...
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| 收稿时间： | 1994-10-28 |
Advanced Heterodyne Interferometer with Common Path for Roughness Measurement |
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| LI Xiang, WANG Jia, ZHAO Yang, LI Dacheng,CAO Mang. Advanced Heterodyne Interferometer with Common Path for Roughness Measurement[J]. 中国激光(英文版), 1995, 4(3): 257-261 |
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| Authors: | LI Xiang WANG Jia ZHAO Yang LI Dacheng CAO Mang |
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| Abstract: | An optical heterodyne system for the measurement of profile and roughness hasbeen developed. Several improved techniques are employed. The optical system was designedwith entire common path. The affect of sample vibration and the thermal drift could be eliminated. A modified objective was used to Perform the measurement beam and the referencebeam, respectively. The detected signals were processed with phase comparison technique togive a high accuracy. The optical system can be developed to an acessory of the Zeeman laserinterferometers |
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| Keywords: | roughness measurement common path heterodyne interferometers |
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