| 一种基于倾斜悬臂梁的高性能硅微陀螺 |
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| 引用本文： | 肖定邦,吴学忠,侯占强,陈志华,董培涛,李圣怡.一种基于倾斜悬臂梁的高性能硅微陀螺[J].半导体学报,2009,30(4):044012-4. |
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| 作者姓名： | 肖定邦 吴学忠 侯占强 陈志华 董培涛 李圣怡 |
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| 作者单位： | Microsystem;Laboratory;National;University;Defense;Technology; |
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| 摘 要： | This paper presents a novel structure for improving the stability and the mechanical noise of micromachined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechanical noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/（deg/sec） with a nonlinearity better than 0.12% in a measurement range of ±100 deg/sec. The short-term bias stability in 20 min is 60 deg/h.
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| 关 键 词： | 微机械陀螺 悬臂 悬挂 微陀螺仪 性能 测量范围 机械噪音 新型结构 |
High-performance micromachined gyroscope with a slanted suspension cantilever |
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| Xiao Dingbang,Wu Xuezhong,Hou Zhanqiang,Chen Zhihu,Dong Peitao and Li Shengyi.High-performance micromachined gyroscope with a slanted suspension cantilever[J].Chinese Journal of Semiconductors,2009,30(4):044012-4. |
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| Authors: | Xiao Dingbang Wu Xuezhong Hou Zhanqiang Chen Zhihu Dong Peitao and Li Shengyi |
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| Institution: | Microsystem Laboratory, National University of Defense Technology, Changsha 410073, China;Microsystem Laboratory, National University of Defense Technology, Changsha 410073, China;Microsystem Laboratory, National University of Defense Technology, Changsha 410073, China;Microsystem Laboratory, National University of Defense Technology, Changsha 410073, China;Microsystem Laboratory, National University of Defense Technology, Changsha 410073, China;Microsystem Laboratory, National University of Defense Technology, Changsha 410073, China |
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| Abstract: | This paper presents a novel structure for improving the stability and the mechanical noise of microma-chined gyroscopes. Only one slanted cantilever is used for suspension in this gyroscope, so the asymmetry spring and the thermal stress, which most micromachined gyroscopes suffer from, are reduced. In order to reduce the mechani-cal noise, the proof masses are designed to be much larger than in most micromachined gyroscopes. The gyroscope chip is sealed at 0.001 Pa vacuum. A gyroscope sample and its read-out circuit are fabricated. The scale factor of this gyroscope is measured as 57.6 mV/(deg/sec) with a nonlinearity better than 0.12% in a measurement range of ±100 deg/sec. The short-term bias stability in 20 min is 60 deg/h. |
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| Keywords: | micromachined gyroscope slanted cantilever proof mass |
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