| 薄圆片石英晶体应力分布及谐振器力频实验 |
| |
| 引用本文： | 罗兵,田文杰,邹淑芳.薄圆片石英晶体应力分布及谐振器力频实验[J].微纳电子技术,2009,46(8). |
| |
| 作者姓名： | 罗兵 田文杰 邹淑芳 |
| |
| 作者单位： | 1. 北京信息科技大学传感器重点实验室,北京,100101
2. 云南广播电视大学,昆明,650223 |
| |
| 基金项目： | 北京市自然科学基金，北京(传感器)重点实验室开放课题基金(KM200810772008)I北京市教委科技创新平台基金资助项目 |
| |
| 摘 要： | 利用ANSYS有限元理论模型分析AT切石英晶体受沿x轴方向的对径力作用时晶片内的应力分布情况,并计算三电极位置处的应力变化比值。测试了三电极谐振器的基频振荡频率,并计算其相应的力频系数。通过比较ANSYS仿真分析的结果和实验所得结果,表明ANSYS仿真分析计算结果与实验结果基本一致,从而证明ANSYS仿真分析是可行的。因此,在同一晶体基片上设计谐振器时,可借助有限元分析手段,根据晶片内的应力分布情况,在有限空间范围内初步选择应力变化差异较大的位置设置电极,以此获得力频敏感特性显著的集成式石英晶体谐振器。
|
| 关 键 词： | 石英晶体 ANSYS分析 谐振器 力频灵敏度系数 应力分布 |
Stress Distribution of Thin Circular Quartz Crystals and Force Frequency Sensitive Experiments |
| |
| Luo Bing,Tian Wenjie,Zou Shufang.Stress Distribution of Thin Circular Quartz Crystals and Force Frequency Sensitive Experiments[J].Micronanoelectronic Technology,2009,46(8). |
| |
| Authors: | Luo Bing Tian Wenjie Zou Shufang |
| |
| Institution: | 1.The Key Laboratory for Sensor;Beijing Information Science & Technology University;Beijing 100101;China;2.Yunnan Radio & TV University;Kunming 650223;China |
| |
| Abstract: | The stress distribution of a circular quartz crystal was analized by using ANSYS finite element method when quartz crystal was subjected to a force F along x axis.The ratios of the stresses changing in the three electrode points were calculated.The base-frequency of three-electrode resonators was tested,and the corresponding force frequency coefficients were calculated.By comparing the results of ANSYS simulation analysis with the experiment results,it shows that they are basically identical,and proves that... |
| |
| Keywords: | quartz crystal ANSYS analysis resonator force frequency sensitivity coefficients stress distribution |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
