| Abstract: | The composition and gross structural features of plasma polymers formed in the glow regions of an inductively coupled RF plasma with perfluorobenzene and perfluorobenzene/hydrogen mixtures were investigated by ESCA as a function of the operating parameters. The carbon-to-fluorine stoichiometries of the perfluorobenzene polymers are similar and close to those of the starting material but not of the polymers derived from perfluorobenzene/hydrogen mixtures. The rate of film deposition is dependent on the W/FM parameter. Angular and photon energy-dependent studies confirm the vertical homogeneity of the plasma polymer films investigated. |
