Palladium-doped polyimides: An X-ray photoelectron study

Five polyimide films prepared from 3,3′,4,4′-benzophenone tetracarboxylic acid'dianhydride (BTDA) and diamines, 4,4′-oxydianiline (ODA), 3,3′-diaminobenzophenone (DABP), or 3,3′-diaminodiphenylcarbinol (DADPC) and doped with Li₂PdCl₄ (LTP) or Pd(CH₃)₂S]₂Cl₂ (PDS) were selected for a detailed x-ray photoelectron spectroscopic (XPS) study to determine the oxidation state of palladium and the relative distribution of this and other elements in these films, especially as they relate to electrical resistivity. XPS shows that Pd in the films is present as a mixture of zero and +2 valence states. Films that contain lithium as part of the dopant all show that metal is present as Li⁺ and Li₂O, a fact that may have a bearing on film electrical properties. An Auger electron spectroscopic (AES) or XPS profiling was performed on two of the electrically conductive films. A film doped with PDS reveals a majority of palladium at the surface as Pd(0) and much smaller amounts in film bulk as a mixture of Pd(0) and Pd(II). Film behavior is similar to a metal-vapor deposited film. An LTP doped film, by contrast, exhibits a homogeneous composition with a mixture of Pd(0) and Pd(II). These studies support others that use chemical etching on the film surfaces. Scanning electron microscopy (SEM) has been used to provide surface evaluations.