Channeling in charged particle analysis |
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| Authors: | W. D. Mackintosh |
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| Affiliation: | (1) Atomic Energy of Canada Limited, Chalk River Nuclear Laboratories, Chalk River, Ontario, (Canada) |
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| Abstract: | When a matrix of interest is a single crystal the channeling phenomenon can be exploited to increase the scope of charged particle analyses. One application provides increased sensitivity and precision in the analysis of surface films; another a means of locating foreign atoms within the crystal lattice. |
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