| 波长渐变滤光片的镀制 |
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| 引用本文： | 秦洁玉,罗崇泰,马勉军,王多书,金扬利.波长渐变滤光片的镀制[J].光学技术,2006,32(Z1). |
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| 作者姓名： | 秦洁玉 罗崇泰 马勉军 王多书 金扬利 |
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| 摘 要： | 采用常规的真空蒸发镀膜技术,利用自行设计制作的膜厚修正挡板机构,分别在1cm×3cm的条形K9玻璃基底和Si基底上镀制出了波长渐变滤光片。滤光片的波段范围从可见光区直至中红外区。阐述了波长渐变滤光片的镀制工艺及其结果,分析了在实际镀制中膜厚偏差产生的原因,提出了修正系统偏差的可行性方法。
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| 关 键 词： | 波长渐变滤光片 挡板 镀制 |
The fabrication of linear variable filters |
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| QIN Jie-yu,LUO Chong-tai,MA Mian-jun,WANG Duo-shu,JIN Yang-li.The fabrication of linear variable filters[J].Optical Technique,2006,32(Z1). |
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| Authors: | QIN Jie-yu LUO Chong-tai MA Mian-jun WANG Duo-shu JIN Yang-li |
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| Abstract: | With a self designed mask for adjusting the thin film thickness,using PVD technique,linear variable filters are fabricated on the base slats of 1cm×3cm.The base slats are made of K9 glass and Si.The wave band area of the fabricated filters is from visible spectrum to near and middle infrared spectrum.The depositing technique for fabricating the filters and the results are given.The reason of how the system error comes into is analyzed,and a feasible method to adjust the system error is broughted forward. |
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| Keywords: | linear variable filters(LVF) mask fabrication |
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