| 微波反射法测量半导体电阻率与温度的关系 |
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| 引用本文： | 褚幼令,汪根荣,朱景兵.微波反射法测量半导体电阻率与温度的关系[J].固体电子学研究与进展,1986(4). |
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| 作者姓名： | 褚幼令 汪根荣 朱景兵 |
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| 作者单位： | 复旦大学物理系
(褚幼令，汪根荣)，复旦大学物理系(朱景兵) |
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| 摘 要： | 本文报导了用微波介质波导反射法无接触测量半导体电阻率的实验装置.利用该装置测量了一组样品的电阻率与温度(100～500K)关系,讨论了载流子迁移率与温度关系和Dorkel的半经验公式.
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Measuring the Temperature Dependence of Resistivity of Semiconductor Wafer by a Microwave Reflection Method |
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| Abstract: | We have designed a contactless measurement apparatus by a microwave dielectric waveguide reflection method. Using this apparatus, we measured the temperature dependence of resistivity in some samples, ranging from 100K to 500K. Finally we discuss the temperature dependence of carrier mobility and the Dorkel's semi-empirical formula. |
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