Abstract: | In this work, an efficient electroosmotic pump (EOP) based on the ultrathin silica nanoporous membrane (u‐SNM), which can drive the motion of fluid under the operating voltage as low as 0.2 V, has been fabricated. Thanks to the ultrathin thickness of u‐SNM (~75 nm), the effective electric field strength across u‐SNM could be as high as 8.27 × 105 V m?1 in 0.4 M KCl when 1.0 V of voltage was applied. The maximum normalized electroosmotic flow (EOF) rate was as high as 172.90 mL/min/cm2/V, which was larger than most of other nanoporous membrane based EOPs. In addition to the ultrathin thickness, the high porosity of this membrane (with a pore density of 4 × 1012 cm?2, corresponding to a porosity of 16.7%) also contribute to such a high EOF rate. Moreover, the EOF rate was found to be proportional to both the applied voltage and the electrolyte concentration. Because of small electrokinetic radius of u‐SNM arising from its ultrasmall pore size (ca. 2.3 nm in diameter), the EOF rate increased with increasing the electrolyte concentration and reached the maximum at a concentration of 0.4 M. This dependence was rationalized by the variations of both zeta potential and electrokinetic radius with the electrolyte concentration. |