Abstract: | In this communication, we assembled ordered polystyrene (PS) microsphere array as a template with the drop‐coating method, and the oxygen plasma was used to etch the template to adjust the spacing between the PS microspheres. Nano‐triangular gold array and silver nano‐pyramid array were obtained by ion beam sputtering to deposit precious metal gold and silver. We observed the surface morphology of Au and Au/Ag composite films by scanning electron microscope and characterized the films by X‐ray diffraction and ultraviolet/visible light spectrophotometer. The results show that the etching time of oxygen plasma has an obvious effect in adjusting the spacing between PSs and has a significant effect on the morphology of Au structure. |