Affiliation: | 1. Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation, 1 Komukai Toshiba-cho, Saiwai-ku, Kawasaki 212-8582, Japan;2. Department of Material Science, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan;3. CREST-JST, Kawaguchi, Saitama 332-0012, Japan |