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Growth mechanism in atomic layer epitaxy (III) reevaporation of Cd and Te from CdTe (111) surfaces and thick elemental deposits monitored by quadrupole-mass spectrometry
Authors:M A Herman  P Juza  W Faschinger  H Sitter
Abstract:Quadrupole-mass spectroscopical (QMS) studies on isothermal reevaporation of Cd and Te species from the CdTe (111) surface have been performed in two extreme cases. The first concerns the reevaporation of thick, bulk-like non-crystalline Cd and Te films deposited in high vacuum at room temperature on the (111) surface, whereas in the second case evaporation of the constituent species from the bare single crystalline (111) surface has been investigated. The fluxes of the species desorbing in high vacuum (10−6 Pa) have been monitored with QMS and the desorption temperatures have been measured with a thermocouple mounted as near as possible to the sample surface. The following values Ea(Cd)bulk = 1.13 ± 0.12 eV, Ea(Te)bulk = 1.64 ± 0.18 eV and Ea(Cd)(111) = 1.13 ± 0.06 eV, Ea(Te)(111) = 1.92 ± 0.13 eV of the activation energies for these two cases have been determined from the slopes of the Arrhenius plots. Using these experimental values, the numbers of atomic bonds NCd and NTe occurring in the atomic aggregates of quasi-gas molecules forming the near surface quasi-gas transition layers have been estimated. For Cd quasi-gas molecules 2 ≤ NCd ≤ 5, whereas for Te molecules 3 ≤ NTe ≤ 10. However, no prediction concerning the number of atoms creating the quasi-gas molecules could be made on the basis of the QMS investigations. It has also been shown that Cd atoms evaporate from the bare single crystalline CdTe (111) surface with an activation energy that is equal (in the limits of the experimental error) to the activation energy for sublimation of Cd atoms from pure, non-crystalline, bulk Cd pieces. The analogous activation energy measured for Te atoms is about 20% larger than that of the relevant sublimation process. This result confirms the fact that Te atoms are bound much stronger in the CdTe crystal lattice than Cd atoms.
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