Small-size systems for separation of primary ion beams in microprobe equipment |
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| Authors: | S A Kuzema S N Mordik |
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| Institution: | (1) Institute of Applied Physics, National Academy of Sciences of Ukraine, ul. Petropavlovskaya 58, Sumy, 40030, Ukraine |
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| Abstract: | The ion-optical properties and other characteristics of various versions of a double-focusing mass separator are studied. In these designs, the ion transit path is shortened by appropriately selecting the geometry of the ion-optical system. The resolving power of the separating systems is determined with allowance for second-order aberrations. |
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