Halogen exchange reactions of silicon tetrafluoride with phosphorus trichloride and phosphoryl chloride

Silicon tetrafluoride undergoes halogen exchange reactions with both phosphorus trichloride and phosphoryl chloride at temperatures of 500–600°C yielding mixed chlorofluorides of silicon and phosphorus. It is interesting to note that, at these high temperatures, PCl₃ undergoes complete exchange to form PF₃ while POCl₃ reacts only with partial substitution, the major products being phosphorus chloride difluoride and silicon trichloride fluoride.