| 散斑相干法测量表面粗糙度时相干光夹角变化对测量的影响 |
| |
| 引用本文： | 王亚伟 阎大鹏. 散斑相干法测量表面粗糙度时相干光夹角变化对测量的影响[J]. 应用光学, 1993, 14(2): 60-64 |
| |
| 作者姓名： | 王亚伟 阎大鹏 |
| |
| 作者单位： | 江苏工学院，南京华东工学院，南京华东工学院 |
| |
| 摘 要： | 本文根据Leger激光散斑相干性理论,讨论测量表面粗糙度σ时两相干光束之间夹角的变化对测量精度和测量范围的影响,提出了合理选择夹角的理论依据,并从实验上得到了验证。
|
| 关 键 词： | 测量 表面粗糙率 散斑法 相干性 |
THE EFFECT OF THE CHANGE OF ANGLE BETWEEN TWO COHERENT BEAMS ON MEASUREMENT FOR MEASURING SURFACE ROUGHNESS WITH SPECKLE COHERENT METHOD |
| |
| Wang Yawei. THE EFFECT OF THE CHANGE OF ANGLE BETWEEN TWO COHERENT BEAMS ON MEASUREMENT FOR MEASURING SURFACE ROUGHNESS WITH SPECKLE COHERENT METHOD[J]. Journal of Applied Optics, 1993, 14(2): 60-64 |
| |
| Authors: | Wang Yawei |
| |
| Abstract: | The effect of the change of angle between two coherent beams on measuring accuracy and range for measuring the surface roughness is discussed according to Leger laser speckle coherent theory, a theoretical criterion of reasonably choosing the angle between two beams is given and verified experimentally. |
| |
| Keywords: | measurement laser speckle coherence surface roughness |
| 本文献已被 CNKI 维普 等数据库收录！ |
