Formation of extended mesodefects in anodic tantalum oxide thin films |
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Authors: | V. I. Kukuev E. A. Tutov V. V. Chernyshev |
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Affiliation: | (1) Voronezh State University, Voronezh, 394006, Russia |
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Abstract: | Tantalum oxide films with extended mesodefects (cracks) were prepared by electrochemical anodization with subsequent bending deformation. The dependences of the average width of cracks and their average concentration on the relative elongation are determined. |
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