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Formation of extended mesodefects in anodic tantalum oxide thin films
Authors:V. I. Kukuev   E. A. Tutov  V. V. Chernyshev
Affiliation:(1) Voronezh State University, Voronezh, 394006, Russia
Abstract:Tantalum oxide films with extended mesodefects (cracks) were prepared by electrochemical anodization with subsequent bending deformation. The dependences of the average width of cracks and their average concentration on the relative elongation are determined.
Keywords:
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