Fabrication of three-dimensional microfluidic channels in glass by femtosecond pulses |
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| Authors: | Cunxia Li Tao Chen Feng Chen Aiqin Li Xun Hou |
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| Institution: | Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shannxi Key Lab of Information Photonic Technique, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xianing-xilu 28, Xi’an, Shanxi 710049, China |
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| Abstract: | Fabrication of three-dimensional microfluidic channels in glasses by water-assisted ablation with femtosecond laser pulses was investigated. The experimental results showed that formation of the photoinduced microchannels by femtosecond pulses depended on the incident laser power and the scanning speed. For the same scanning speed, the shape of cross-section of channels changed from ellipse to circle with increasing the laser power. Under the optimum condition of laser processing, we fabricated two layers of microfluidic channels with diameter of about 8 μm inside glass. The distance between two layers of microchannels was about 20 μm. |
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