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Subwavelength structures for broadband antireflection application |
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| Authors: | Chia-Jen Ting Chi-Feng Chen C.P. Chou |
| Affiliation: | a Mechanical Engineering Department, National Chiao Tung University, 300, Taiwan, ROC b Mechanical and Systems Research Laboratories, Industrial Technology Research Institute, 310, Taiwan, ROC c Department of Mechanical Engineering and Institute of Opto-Mechatronics Engineering, National Central University, Chung-li, Taiwan, ROC |
| Abstract: | The subwavelength structures are designed and fabricated for broadband antireflection application. Under target of zero reflectivity, the parameters of periodic 2-D continuous conical structures are analyzed by the finite-difference time-domain (FDTD) method. The corresponding conical structures are obtained with spatial period of 350 nm and structure height of 300 nm, respectively. The 2-D continuous conical structured surface is fabricated by micro-replication process combining with the originated structure fabrication realized by interference lithography, Ni mold electroplation and replication by using UV imprinting into plastics. The average reflectances of the simulation and replicated polymer prototype are about 0.50% and 0.54% within the spectral ranges of 400-650 nm, respectively. In a word, the subwavelength structured surface with low reflection is developed and proved to be highly consistent with the simulation results. |
| Keywords: | Subwavelength structure Antireflection Micro-replication process Nanostructure Finite-difference time-domain Roll to Roll Nano-imprinting process |
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