| Ion Beam Polishing for K9 Glass |
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| 引用本文： | SU Zhiwei CHEN Qingchuan. Ion Beam Polishing for K9 Glass[J]. 核工业西南物理研究院年报(英文版), 2005, 0(1): 147-149 |
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| 作者姓名： | SU Zhiwei CHEN Qingchuan |
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| 摘 要： |
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| 关 键 词： | 离子束抛光 AFM 超光滑表面 制造技术 K9玻璃 |
Ion Beam Polishing for K9 Glass |
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| Abstract: | K9 glass is a common material of optics and micro system, with cheaper price and better processing function. With the development of the optical and micro system, the technique of manufacturing micron/nanometer dimensions microstructure and micro device on K9 glass has used in photoelectron, microwave and diffraction optics device et al The coarse surface of optics and microwave device can cause the light scattering and signal losing, and the function of device reduced. So the supersmooth surface plays an important role in optic and microwave device. |
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| Keywords: | K9 Glass Ion beam polishing AFM Supersmooth surfaces |
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