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Vapour epitaxial growth and characterization of InAs1-xPx
Authors:J HallaisC Schemali  E Fabre
Institution:Laboratoires d''Electronique et de Physique Appliquée, 3, Avenue Descartes, 94 - Limeil-Brévannes, France
Abstract:The vapour growth of InAs1-xPx layers has been carried out by the hydride process. The phosphorus rich part of the system (0.7 ? x ? 1) was especially investigated. Heteroepitaxial deposits of InAs1-xPx and InP have been performed on substrates such as InAs, GaAs and GaP. A systematic study of the influence of the substrate orientation on the quality of the layer has been carried out by growth on hemispherical substrates. Preferential planes have been pointed out: (100) and (111) A for InAs, (111) for GaAs and GaP. The band gap variation as a function of the composition has been determined by photoluminescence at 4.2 °K and X-ray diffraction measurements. It fits the equation: EG(x) eV = 0.425 + 0.722 x + 0.273 x2 at 4.2 °K.
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