Surface morphology of poly(cyano-p-xylylene) thin films

The surface morphology of poly(cyano-p-xylylene) thin films of different thicknesses (25–1500 nm or more than 5 µm) that were synthesized by vapor-deposition polymerization on the substrate surface in the temperature range from ?22 to +35°C has been studied by atomic force microscopy. The surface topography is quantified through analysis of the height-height correlation function. The surface of all films is characterized by a similar granular morphology with a transverse size of granules of 50–500 nm. The surface morphology changes with the polymerization temperature (the substrate temperature) and the film thickness. The effect of film annealing on its surface morphology is considered. It has been established that annealing at 200°C leads to a change in the surface morphology of the films.