Synthesis of nanocrystalline titanium dioxide films in a cylindrical magnetron-type gas discharge and their optical characterization

The plasma-dynamic and spectral characteristics of a cylindrical magnetron-type gas discharge are studied experimentally. The radiation spectrum of the plasma is recorded in real time in the range 350–820 nm. Appropriate conditions for synthesis of TiO₂ binary compound are found. They are provided by maintaining the intensities of the spectral lines of reactants and a plasma-forming gas at a desired level. The feasibility of monitoring the TiO₂ film synthesis conditions from the spectral characteristics of the discharge plasma and from the variation of the discharge voltage is considered. Ellipsometric and spectral data for nanocrystalline titanium dioxide films indicate that the refractive index of the film depends on its thickness.