| 超大规模集成电路波导光互连技术的现状与前景 |
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| 引用本文： | 祖继锋 邹立勋. 超大规模集成电路波导光互连技术的现状与前景[J]. 应用光学, 1992, 13(6): 1-3,11 |
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| 作者姓名： | 祖继锋 邹立勋 |
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| 作者单位： | 哈尔滨工业大学应用物理系，哈尔滨工业大学应用物理系 |
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| 摘 要： | 介绍超大规模集成电路(VLSI)波导(?)互连技术的最新进展,并预测其发展方向,以及如阿解决存在的实际问题。
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| 关 键 词： | 超大规模 集成电路 波导 互连工艺 |
THE PRESENT CONDITION AND PROSPECT OF OPTICAL WAVEGUIDE INTERCONNECTION TECHNIQUE FOR VLSI |
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| Zu Jifeng Zou Lixun. THE PRESENT CONDITION AND PROSPECT OF OPTICAL WAVEGUIDE INTERCONNECTION TECHNIQUE FOR VLSI[J]. Journal of Applied Optics, 1992, 13(6): 1-3,11 |
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| Authors: | Zu Jifeng Zou Lixun |
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| Affiliation: | Ha'erbin Institute of Technology |
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| Abstract: | The latest advance and developing trend of optical waveguide interconnection technique for VLSI are described, And it is pointed out that how the practical problems in it are solved, |
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| Keywords: | very large scale integration circuit waveguide interconnection detector |
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