双面阵CCD实时测量激光发散角的系统

针对目前激光光束发散角测试速度慢，实时性差的问题，提出采用两个面阵CCD同时测量激光远场区域两个不同位置的光束宽度，用两点拟合的方法计算激光光束发散角的方法。该方法装置简单，可快速实时准确地测量激光光束发散角。测试结果表明，系统测量误差<0.1 mrad,重复测量误差均±1%之内。该测量方法研制的仪器成本低、测试效率高、便于携带，适合设备生产现场和空间有限的快速实时检测需求。

Two CCD imaging system for real time measurement of laser divergence angles

In view of slow speed and poor real time performance of the current measurement of laser beam divergence angle,a method to simultaneously measure the beam width at two different positions in the far field region by using two CCD imaging system is proposed.The laser beam divergence angle is calculated by using two point fitting method.This method is simple and provides fast and accurate measurement of the divergence angle of laser beam in real time.The test results show that the measurement error of the system is less than 0.1 mrad and the repeated measurement errors are within ±1%.The device developed by this technique has the characteristics of low cost,efficient and portability.It is particularly suitable for rapid real time testing on equipment production sites and where space is limited.