| 膜厚宽带监控系统中背景噪声的抑制 |
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| 引用本文： | 韩军,屈战国,尚小燕,安毓英. 膜厚宽带监控系统中背景噪声的抑制[J]. 光学技术, 2005, 31(6): 928-930 |
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| 作者姓名： | 韩军 屈战国 尚小燕 安毓英 |
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| 作者单位： | 西安电子科技大学,技术物理学院,陕西,西安,710071;西安工业学院,光电工程学院,陕西,西安,710071;西安工业学院,光电工程学院,陕西,西安,710071;西安电子科技大学,技术物理学院,陕西,西安,710071 |
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| 摘 要： | 根据CCD器件只适于检测直流或缓变交流信号的特点,基于CCD膜厚监控系统和CCD探测器的强背景噪声环境,利用步进电机的可控、可知性,实现了步进电机与CCD数据采集卡的精确匹配,完成了信号在亮周期和暗周期中的精确采样。结果表明,背景噪声得到了有效的抑制,保证了实测光谱曲线的准确性。
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| 关 键 词： | 镀膜 宽带监控 步进电机 CCD 光谱 |
| 文章编号： | 1002-1582(2005)06-0928-03 |
| 修稿时间： | 2005-09-12 |
Research on background noise control and operation technology of thin-film thickness wideband monitoring system |
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| HAN Jun,QU Zhan-guo,SHANG Xiao-yan,AN Yu-ying. Research on background noise control and operation technology of thin-film thickness wideband monitoring system[J]. Optical Technique, 2005, 31(6): 928-930 |
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| Authors: | HAN Jun QU Zhan-guo SHANG Xiao-yan AN Yu-ying |
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| Abstract: | According to CCD suiting to deal with direct current(DC) or slow change alternating current(AC) signal,based on CCD detector working under strong background noise condition in the thin-film thickness wideband monitoring system and the controllability and knowability of stepper motor,the accurate match of CCD data-grabbing-board with the stepper motor was achieved,and the signal of light and dark period was grabbed correctly.The background noise is controlled efficiently.This ensure that the practical spectrum curve is true. |
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| Keywords: | coating wideband monitoring stepper motor CCD spectrum |
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