Energy and angular distributions of backscattered electrons from collisions of 5 keV electrons with thick Al,Ti, Ag,W and Pt targets

The energy and angular distributions of backscattered electrons produced under the impact of 5 keV electrons with thick Al, Ti, Ag, W and Pt targets are measured. The energy range of backscattered electrons is considered between E _B = 50 eV and 5000 eV. The angle of incidence α and take-off angle θ are chosen to have values α = 0 and 10 and θ = 100, 110 and 120 respectively. The measured energy spectra are compared with the available theoretical models for α = 0 and 10. The elastic peak intensity of backscattered electrons is found to be a function of angle of incidence, take-off angle and atomic number of the target material. The considered theories are reasonably in good agreement with experiment for the energy spectra of the backscattered electrons having their reduced energies ∈ (= E _B/E ₀) in the range of 0.20 to 1.00.