Surface profile inspection of a moving object by using dual-frequency Fourier transform profilometry

The 2π phase ambiguity caused by surface isolations and large height step can be solved by dual-frequency projection grating profilometry. However, in the Fourier transform profilometry (FTP) of a moving object, only one single deformed fringe pattern can be obtained. In order to introduce the dual-frequency technique into the FTP of moving object, a novel experimental system is designed to capture two fringe patterns with different frequency at the same time. A grating structure comprising two regions with different frequencies is projected upon the surface of the detected object. Two line-scan CCD cameras are used to capture the surface images encoded by the two kinds of patterns, respectively. By getting the corresponding image intensity at the same point of the object surface in the two acquired images, the dual-frequency technique is applied to extract the real phase without phase ambiguity. The surface profile of a specimen with a large height step is measured to prove the feasibility of the proposed method. The experimental results show that the proposed method can solve the 2π phase ambiguity problem successfully in the surface profile inspection of a moving object.