Conversion efficiency enhanced photovoltaic device with nanohole arrays in antireflection coating layer

In this paper, the authors introduce an enhanced photovoltaic device with nanohole arrays only in its antireflection coating. These nanoholes can improve light trapping efficiency as well as photoelectric conversion efficiency of the device. The authors analyze the light absorption of the devices with nanohole arrays by Finite-Difference Time Domain method and calculate the photoelectric conversion efficiency. The results show that the nanohole arrays can improve the light trapping more efficiently than the Si₃N₄ antireflection coating, especially, in 400-600 nm spectral range. Nanohole arrays with different characteristic parameters were fabricated in the antireflection coating layer of a Φ200 μm Si detector by using focused-ion beam system. With the optimized nanohole arrays, the enhancements factor of the experimental sample's photoelectric conversion efficiency is ~ 16% within the 400-600 nm spectral range and ~ 10% within the 400-1100 nm spectral range.