Two localized CO2 laser treatment methods for mitigation of UV damage growth in fused silica

Two methods: high-power, short-time, single-shot irradiation (Method A) and low-power, long-time, multi-shot irradiation (Method B) are investigated to mitigate the UV damage growth in fused silica by using a 10.6-μm CO₂ laser. To verify the mitigation effect of the two methods, the laser induced damage thresholds (LIDTs) of the mitigated sites are tested with a 355-nm, 6.4-ns Nd:YAG laser, and the light modulation of the mitigation sites are tested with a 351-nm continuous Nd:YLF laser. The mitigated damaged sites treated with the two methods have almost the same LIDTs, which can recover to the level of pristine material. Compared with Method A, Method B produces mitigated sites with low crater depth and weak light modulation. In addition, there is no raised rim or re-deposited debris formed around the crater edge for Method B. Theoretical calculation is utilized to evaluate the central temperature of the CO₂ laser beam irradiated zone and the radius of the crater. It is indicated that the calculated results are consistent with the experimental results.