| 基于等色干涉的膜分析 |
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| 引用本文： | 李建民,王增波,南景宇,王蕴芬,田野.基于等色干涉的膜分析[J].物理实验,2006,26(7):31-33. |
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| 作者姓名： | 李建民 王增波 南景宇 王蕴芬 田野 |
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| 作者单位： | 河北北方学院物理系 河北张家口075028(李建民，王增波，南景宇，田野)，河北建筑工程学院机械系 河北张家口075024(王蕴芬) |
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| 摘 要： | 基于膜等色干涉原理,将等色干涉条纹与已知线光谱在光谱仪谱面上叠加,通过对干涉条纹宽度及其变化的测量,可计算出膜厚、膜厚突变、膜厚渐变等.对膜进行扫描分析,膜的面积达10-2mm2数量级即可进行测量.
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| 关 键 词： | 薄膜 厚度 等色干涉 光谱仪器 |
| 文章编号： | 1005-4642（2006）07-0031-03 |
| 收稿时间： | 2005-12-13 |
| 修稿时间： | 2006-03-15 |
Analysis of thin films based on the chromatic interference |
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| LI Jian-min , WANG Zeng-bo , NAN Jing-yu , WANG Yun-fen ,TIAN Ye.Analysis of thin films based on the chromatic interference[J].Physics Experimentation,2006,26(7):31-33. |
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| Authors: | LI Jian-min WANG Zeng-bo NAN Jing-yu WANG Yun-fen TIAN Ye |
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| Institution: | 1. Department of Physics, Hebei North College, Zhangjiakou 075028, 2. Department of Machine, Hebei Architectural Engineering College, Zhangjiako 075024, China |
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| Abstract: | Based on the principle of the chromatic interference,the chromatic interference pattern and the known line spectrum are superposed on the spectrum plane of spectrophotometer.The thickness,thickness saltation,thickness gradual change of thin films can be calculated by measuring the width and varieties of interference fringes.The thin film can be analyzed with scanning.This method is applicable for thin films larger than 10~(-2) mm~2. |
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| Keywords: | thin films thickness chromatic interference spectrophotometer |
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