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Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers |
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| Authors: | X.S. Zhou C. Zhao R. Hou J. Zhang K.J. Kirk D. Hutson Y.J. Guo P.A. Hu S.M. Peng X.T. Zu Y.Q. Fu |
| Affiliation: | 1. Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China;2. Scottish Universities Physics Alliance (SUPA), University of West of Scotland, Paisley PA1 2BE, Scotland, United Kingdom;3. Key Lab of Microsystem and Microstructure, Harbin Institute of Technology, Ministry of Education, No. 2 YiKuang Street, Harbin 150080, Heilongjiang, PR China;4. School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, PR China |
| Abstract: | Nanocrystalline ZnO films with both C-axis vertical grown and inclined angled grown were sputter-deposited onto aluminium foils (50 μm thick) and characterised for using as flexible ultrasonic transducers. As-deposited C-axis grown ZnO films were annealed at different temperatures up to 600 °C to enhance film crystallinity and reduce film stress. The C-axis grown ZnO film on the Al foil were bonded onto steel plates, and the pulse-echo tests verified a good performance (with dominant longitudinal waves) of the ultrasonic transducers made from both as-deposited and post-annealed films. Inclined angled ZnO films on the Al foil glued onto steel plates generated mixed shear and longitudinal waves in the pulse-echo test. |
| Keywords: | ZnO film Annealing Flexible ultrasonic transducer Pulse-echo Ultrasonic wave |
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