Analysis of optical configurations for ESPI |
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Authors: | Amalia Martí nez, J.A. Rayas, R. Cordero,Katia Genovese |
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Affiliation: | aCentro de Investigaciones en Óptica, A.C. Apartado Postal 1-948, C.P. 37000, León, Gto., México;bLeibniz Universität Hannover, Herrenhäuser Str. 2, D-30419 Hannover, Germany;cDipartimento di Ingegneria e Fisica dell′Ambiente, Università degli Studi della Basilicata, Viale dell′Ateneo Lucano, 10-85100 Potenza, Italy |
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Abstract: | An ESPI optical arrangement consisting of a combination of three illumination and one reference beams is compared to a system with three optical arms corresponding to an out-of-plane and two in-plane interferometers. Experimental data for each component of the displacement vector obtained with both systems are presented and discussed. |
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Keywords: | ESPI Displacements measurement Sensitivity matrix |
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