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Static pull-in analysis of electrostatically actuated microbeams using homotopy perturbation method
Authors:M Mojahedi  M Moghimi Zand  MT Ahmadian
Institution:1. School of Mechanical Engineering, Sharif University of Technology, Tehran, Iran;2. Center of Excellence in Design, Robotics and Automation, School of Mechanical Engineering, Sharif University of Technology, Tehran, Iran
Abstract:In this study, static pull-in instability of electrostatically-actuated microbridges and microcantilevers is investigated considering different nonlinear effects. Galerkin’s decomposition method is utilized to convert the nonlinear differential equations of motion to nonlinear integro-algebraic equations. Afterward, analytic solutions to static deflections of the microbeams are obtained using the homotopy perturbation method. Results are in excellent agreement with those presented in the literature.
Keywords:Analytic solutions  Homotopy perturbation method  MEMS  Static pull-in instability
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