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Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm |
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| Authors: | Kwon Su ChonSeon Kwan Juhng Kwon-Ha Yoon |
| Affiliation: | a Department of Radiological Science, Catholic University of Daegu, 333 Kumrakro, Hayang, Gyeongsan, Gyeongbuk 712-702, Republic of Korea b Institute for Radiological Imaging Science, Wonkwang University, 344-2 Sinyong-dong, Iksan, Jeonbuk 570-749, Republic of Korea c Radiation Imaging Technology Center, Jeonbuk Technopark, 500 Dasongri, Iksan, Jeonbuk 570-802, Republic of Korea |
| Abstract: | An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications. |
| Keywords: | X-ray tomography system X-ray optics Spatial resolution |
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