High-speed atomic force microscopy with phase-detection |
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Authors: | Donghyeok Lee Hyunsoo LeeNS Lee KB KimYongho Seo |
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Institution: | a Faculty of Nanotechnology and Advanced Material Engineering, Sejong University, Seoul 143-747, Republic of Korea b Graphene Research Institute, Sejong University, Seoul 143-747, Republic of Korea |
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Abstract: | In order to improve the scanning speed of tapping mode AFM, we have studied the phase-detection mode AFM with a high frequency (1.5 MHz) cantilever. The phase shifts versus tip-sample distance with different types of samples including polymer, semiconductor, and graphite were measured and the interaction forces were analyzed. It was found that the phase shift in repulsive region is nearly linear as a function of distance, which can be used for feedback control in general, except that some blunt tips cause reversed polarity of phase shift due to excessive energy dissipation. High-speed image with scan rate of 100 Hz was obtained which were controlled with phase shift as a feedback signal. |
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Keywords: | High-speed scanning Phase-detection Atomic force microscope High-speed AFM High frequency cantilever |
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